Electrolytic device

ABSTRACT

An electrolytic apparatus includes an electrolyzer, a heater, and a blower. The electrolyzer accommodates an electrolytic bath. The heater is provided in the electrolyzer while being electrically insulated from the electrolyzer. Similarly, the blower is provided in the electrolyzer while being electrically insulated from the electrolyzer. The heater is turned on so that a temperature of the electrolyzer rises. The heater is turned off and the blower is turned on so that a temperature of the electrolyzer falls. The heater and the blower are switched between ON and OFF so that the temperature of the electrolyzer is kept constant.

TECHNICAL FIELD

The present invention relates to an electrolytic apparatus including an electrolyzer.

BACKGROUND ART

Conventionally, in processes for manufacturing semiconductors, fluorine gases have been used in various applications such as material cleaning and surface modification. In this case, the fluorine gases themselves may be used. Various fluoride-based gases such as NF₃ (nitrogen trifluoride) gas, NeF (neon fluoride) gas, and ArF (argon fluoride) gas that are synthesized based on the fluorine gases may be used.

Electrolytic apparatuses that generate fluorine gases by electrolyzing HF (hydrogen fluoride) have generally been used to stably supply the fluorine gases. In such electrolytic apparatuses, electrolytic baths composed of KF—HF (potassium-hydrogen fluoride) based mixed molten salts are formed in electrolyzers. The electrolytic baths in the electrolyzers are electrolyzed so that fluorine gases are generated. In this case, temperatures of the electrolytic baths in the electrolyzers are required to be kept in predetermined ranges to make electrolytic conditions of the electrolytic apparatuses constant.

In a molten salt electrolytic apparatus discussed in Patent Document 1, for example, a hot water jacket is provided on a side surface on the outer periphery of an electrolyzer. The hot water jacket includes a hot water pipe and a heat insulating layer. The hot water pipe is provided to surround the side surface on the outer periphery of the electrolyzer. In the hot water pipe, a heat medium heated by a hot water heating device is circulated. In the electrolyzer, a thermometer is provided. The hot water heating device heats a heat medium based on a temperature measured by the thermometer, to keep the electrolytic bath in the electrolyzer at a predetermined temperature.

[Patent Document 1] JP 2004-244724 A

SUMMARY OF INVENTION Technical Problem

In an electrolyzer in an electrolytic apparatus, at least a cover portion is required to be grounded to a ground having a reference potential in preparation for discharges in the electrolyzer by electric leakage and static electricity. In a hot water heating device, electric power with large current is handled. Therefore, the hot water heating device is required to be grounded to a ground having a reference potential to ensure safety.

In this case, the cover portion of the electrolyzer is electrically connected to the electrolyzer through an electrolytic bath. When a heat medium has conductivity, a closed circuit including the cover portion of the electrolyzer, the electrolytic bath, the electrolyzer, the heat medium having conductivity, the hot water heating device, and the ground is formed. When electrolization is started using the electrolyzer forming the closed circuit, a current due to a potential difference in the electrolyzer flows in the closed circuit, and electrochemistry corrosion occurs in a metal portion included in the closed circuit.

In order to prevent such electrochemistry corrosion, Patent Document 1 discusses a countermeasure using a piping at least a part of which is insulated and a heat medium having high insulation properties. However, a heat medium being an insulating solvent (e.g., a fluorine-based solvent) and having such a large heat capacity that a temperature of the electrolyzer can be adjusted does not exist. Therefore, an example of the heat medium having a relatively high electrical resistance and having a large heat capacity is pure water. However, the pure water slightly has electric conductivity. Therefore, the above-mentioned electrochemistry corrosion in the metal portion is not completely prevented.

An object of the present invention is to provide an electrolytic apparatus capable of ensuring a heat capacity in which a temperature of an electrolyzer can be sufficiently adjusted while reliably preventing electrochemistry corrosion due to a potential difference.

Solution to Problem

-   (1) According to an aspect of the present invention, an electrolytic     apparatus includes an electrolyzer that accommodates an electrolytic     bath, a heating unit that heats the electrolyzer using its heat     source electrically insulated from the electrolyzer, and a cooling     unit that cools the electrolyzer using its heat dissipation source     electrically insulated from the electrolyzer.

In the electrolytic apparatus according to the aspect of the present invention, the heat source of the heating unit is electrically insulated from the electrolyzer, and the heat dissipation source of the cooling unit is electrically insulated from the electrolyzer. In this state, the electrolyzer is heated by the heat source of the heating unit, and is cooled by the heat dissipation source of the cooling unit.

In this case, the electrolyzer is directly heated and cooled by the heat source and the heat dissipation source, unlike that in heat exchange using a heat medium. Thus, a temperature of the electrolyzer can be sufficiently adjusted.

A potential is not fed to the electrolyzer via the heat source and the heat dissipation source. Therefore, electrochemistry corrosion in the electrolytic apparatus due to the potential difference in the electrolyzer can be reliably prevented.

-   (2) The heating unit may include a heater having a heating element     that is coated with an insulating film as the heat source, and the     heater may be provided in contact with an outer surface of the     electrolyzer.

In this case, the heating element of the heater is provided in contact with the outer surface of the electrolyzer with the insulating film interposed therebetween. Therefore, the electrolyzer is directly heated by heat conduction from the heating element of the heater to the electrolyzer. Thus, the electrolyzer can be heated with high responsiveness.

-   (3) The heating unit may include an infrared heating device that     radiates infrared rays as the heat source, and the infrared heating     device may be spaced apart from the electrolyzer so as to be     insulated therefrom.

In this case, the infrared rays are radiated from the infrared heating device spaced apart from the electrolyzer to the electrolyzer. Thus, the electrolyzer is directly heated by heat radiation. The infrared heating device is reliably insulated from the electrolyzer.

-   (4) The cooling unit may include a blower that blows air to the     electrolyzer as the heat dissipation source, and the blower may be     spaced apart from the electrolyzer so as to be insulated therefrom.

In this case, the blower spaced apart from the electrolyzer blows air to the electrolyzer. Thus, the electrolyzer is directly cooled by air circulation. The blower is reliably insulated from the electrolyzer.

-   (5) The cooling unit may include a cooling device having a cooling     element that is coated with an insulating film as the heat     dissipation source, and the cooling device may be provided in     contact with an outer surface of the electrolyzer.

In this case, the cooling element is provided in contact with the outer surface of the electrolyzer with the insulating film interposed therebetween. Thus, the electrolyzer is directly cooled by absorption of heat from the electrolyzer to the cooling device. Thus, the electrolyzer can be cooled with high responsiveness.

-   (6) A first chamber may be provided in the electrolyzer, and a     second chamber may be provided between the first chamber and the     electrolyzer, and a first electrode may be arranged in the first     chamber, and the electrolyzer may function as a second electrode.

In this case, the electrolyzer electrically insulated from an installation surface, the heat source, and the heat dissipation source functions as a second electrode. Therefore, a stable and accurate voltage can be applied between the first electrode and the second electrode.

-   (7) The electrolytic apparatus may further include a controller that     controls the heating unit and the cooling unit so that a temperature     of the electrolytic bath in the electrolyzer is maintained within a     predetermined target temperature range.

In this case, the controller controls heating of the electrolyzer by the heating unit and cooling of the electrolyzer by the cooling unit. Thus, a temperature in the electrolyzer can be stably and reliably kept within the target temperature range.

-   (8) The electrolytic apparatus may further include a detector that     detects a temperature of the electrolytic bath in the electrolyzer,     and the controller may stop an operation of the heating unit while     operating the cooling unit when the temperature detected by the     detector rises to a first temperature lower than an upper-limit     value of the target temperature range, and may operate the heating     unit while stopping an operation of the cooling unit when the     temperature detected by the detector falls to a second temperature     higher than a lower-limit value of the target temperature range.

In this case, when the temperature of the electrolyzer rises to the first temperature lower than the upper-limit value of the target temperature range, the operation of the heating unit is stopped while the cooling unit operates. Thus, the temperature of the electrolyzer can be prevented from exceeding the upper-limit value of the target temperature range due to overshoot.

When the temperature of the electrolyzer falls to the second temperature higher than the lower-limit value of the target temperature range, the heating unit operates while the operation of the cooling unit is stopped. Thus, the temperature of the electrolyzer can be prevented from being the lower-limit value or less of the target temperature range due to undershoot.

Further, the heating unit is stopped while the cooling unit operates, and the heating unit operates while the cooling unit is stopped. Thus, an overshoot amount and an undershoot amount at the temperature of the electrolyzer can be reduced. As a result, the target temperature range can be reduced, and the temperature of the electrolyzer can be kept substantially constant.

-   (9) The controller may control the heating unit and the cooling unit     so that a difference between the upper-limit value and the     lower-limit value of the target temperature range is within two     degrees.

In this case, the temperature of the electrolyzer is kept substantially constant. Therefore, an electrolyzation condition is kept substantially constant. Thus, more stable electrolyzation can be performed.

-   (10) The electrolyzer may be an electrolyzer for fluorine     generation. Vapor pressure of a fluorine compound used as the     electrolytic bath greatly changes with temperature. In such a case,     the temperature of the electrolytic bath is also controlled stably     and with high accuracy. Therefore, a vapor of a fluorine compound     can be prevented from being released from the electrolytic bath in     the electrolyzer.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, there can be provided an electrolytic apparatus that controls a temperature of an electrolytic bath in an electrolyzer stably and with high accuracy in a low-cost and simple configuration.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic sectional view of an electrolytic apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic view on the outer side of mainly an electrolyzer in the electrolytic apparatus illustrated in FIG. 1.

FIG. 3 is a flowchart illustrating a control operation of a heater and a blower by a controller.

FIG. 4 illustrates results of temperatures of electrolytic bathes in an inventive example and a comparative example.

FIG. 5 is a schematic view on the outer side of mainly an electrolyzer in an electrolytic apparatus according to another embodiment of the present invention.

FIG. 6 is a schematic view on the outer side of mainly an electrolyzer in an electrolytic apparatus according to still another embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

The embodiments of the present invention will be described in detail referring to the drawings. The embodiments below describe an electrolytic apparatus.

(1) Configuration of Electrolytic Apparatus

FIG. 1 is a schematic sectional view of an electrolytic apparatus according to an embodiment of the present invention. FIG. 2 is a schematic view on the outer side of mainly an electrolyzer in the electrolytic apparatus illustrated in FIG. 1.

The electrolytic apparatus 10 illustrated in FIG. 1 is a gas generation apparatus that generates a fluorine gas. The electrolytic apparatus 10 includes an electrolyzer 11. The electrolyzer 11 includes an electrolyzer main body 11 a, an upper cover 11 b, and an insulating member 11 c.

The electrolyzer main body 11 a and the upper cover 11 b are formed of a metal such as Ni (Nickel), Monel, pure iron, or stainless steel or its alloy, for example.

The electrolyzer main body 11 a has a bottom portion and four side portions, and has an opening in its upper part. The insulating member 11 c is provided along upper end surfaces of the side portions. The insulating member 11 c is formed of an insulating material such as resin. The upper cover 11 b is arranged on the insulating member 11 c to close the opening of the electrolyzer main body 11 a. Thus, the insulating member 11 c electrically insulates the electrolyzer main body 11 a and the upper cover 11 b from each other.

In the electrolyzer 11, electric power with large current is handled. Discharges in the electrolyzer 11 by static electricity are required to be prevented. Therefore, a ground wire S1 grounds the upper cover 11 b in the electrolyzer 11 to a ground E. Thus, an electric shock or the like by electric leakage from the electrolyzer 11 is prevented.

A plurality of supporting members 31 composed of an insulating material support the electrolyzer 11 in a housing 32 composed of a conductive material. The supporting member 31 is formed of Bakelite, for example. Wheels 33 composed of an insulating material are attached to a bottom surface of the housing 32. In this manner, the electrolyzer 11 is electrically insulated from the housing 32, and the housing 32 is electrically insulated from an installation surface.

An electrolytic bath 12 composed of a KF—HF (potassium-hydrogen fluoride) based mixed molten salt is formed in the electrolyzer 11. A cylindrical partition wall 13 is provided integrally with the upper cover 11 b so that its part is immersed in the electrolytic bath 12. The partition wall 13 is composed of Ni or Monel, for example. In the electrolyzer 11, an anode chamber 14 a is formed inside the partition wall 13, and a cathode chamber 14 b is formed outside the partition wall 13.

An anode 15 a is arranged to be immersed in the electrolytic bath 12 within the anode chamber 14 a. A low-polarizable carbon electrode, for example, is preferably used as a material for the anode 15 a. A cathode 15 b is formed on an inner surface of the electrolyzer main body 11 a. A hydrogen gas is mainly generated in the cathode chamber 14 b. Ni, for example, is preferably used as a material for the cathode 15 b.

An HF supply line 18 a for supplying HF is connected to the upper cover 11 b. The HF supply line 18 a is covered with a temperature adjustment heater 18 b. Thus, HF is prevented from being liquefied in the HF supply line 18 a. A liquid level detection device (not illustrated) detects the height of a liquid level of the electrolytic bath 12. When the height of the liquid level detected by the liquid level detection device becomes lower than a predetermined value, HF is supplied to the electrolyzer 11 through the HF supply line 18 a.

The electrolytic apparatus 10 includes a controller 23. The controller 23 applies a voltage between the anode 15 a and the cathode 15 b. Thus, the electrolytic bath 12 in the electrolyzer 11 is electrolyzed. Thus, a fluorinate gas is mainly generated in the anode chamber 14 a.

The upper cover 11 b is provided with gas exhaust ports 16 a and 16 b. An exhaust pipe 17 a is connected to the gas exhaust port 16 a, and an exhaust pipe 17 b is connected to the gas exhaust port 16 b. The gas exhaust port 16 a communicates with the anode chamber 14 a, and the gas exhaust port 16 b communicates with the cathode chamber 14 b. A gas generated by the anode chamber 14 a is discharged from the gas exhaust port 16 a through the exhaust pipe 17 a, and a gas generated by the cathode chamber 14 b is discharged from the gas exhaust port 16 b through the exhaust pipe 17 b.

The electrolyzer 11 includes a heater 21 a and a blower 21 b. In the present embodiment, a sheathed heater is used as the heater 21 a. The sheathed heater has a configuration in which an electrically-heated wire is coated with an insulating film. The sheathed heater can obtain a desired heat capacity using the electrically-heated wire. The electrolyzer 11 can be quickly heated by providing the heater 21 a in contact with the electrolyzer 11. The heater 21 a is electrically insulated from the electrolyzer 11, although provided in contact with the electrolyzer 11.

As illustrated in FIG. 2, the heater 21 a is attached to outer surfaces of the side portions of the electrolyzer main body 11 a so as to have a meander shape. Thus, a contact area between the heater 21 a and the electrolyzer main body 11 a increases. The heater 21 a heats the electrolyzer 11 with heat conduction.

The blower 21 b is spaced apart from the electrolyzer 11 so as to be insulated therefrom, and blows air to the electrolyzer 11. Thus, the blower 21 b cools the electrolyzer 11 with air circulation in the state of being electrically insulated from the electrolyzer 11.

The heater 21 a and the blower 21 b operate by electric power supplied from a power supply device 21. The power supply device 21 is grounded to the ground E via a ground wire S2 to ensure safety.

In the present embodiment, the insulating film provided in the sheathed heater serving as the heater 21 a electrically insulates the heater 21 a and the electrolyzer 11 from each other. Air serving as an insulator electrically insulates the blower 21 b and the electrolyzer 11 from each other. In this case, if the upper cover 11 b and a power supply device 21 are grounded to the ground E, to form a closed circuit, a current due to a potential difference in the electrolyzer 11 does not flow through a metal portion of the electrolytic apparatus. Thus, electrochemistry corrosion in a metal portion of the electrolytic apparatus is prevented.

The electrolytic apparatus 10 is provided with a temperature sensor 22 a that detects a temperature of the heater 21 a and a temperature sensor 22 b that detects a temperature of the electrolytic bath 12 in the electrolyzer main body 11 a. In the present embodiment, the temperature sensors 22 a and 22 b are composed of a thermocouple.

The controller 23 controls the heater 21 a and the blower 21 b based on a temperature of the electrolyzer 11 detected by the temperature sensor 22 a and a temperature of the electrolytic bath 12 detected by the temperature sensor 22 b.

(2) Temperature Control Operation

An operation for controlling the temperature of the electrolytic bath 12 in the electrolyzer 11 by the controller 23 will be described below.

The electrolytic bath 12 in the electrolyzer 11 assumes a solid state at room temperature and under atmospheric pressure. Therefore, the electrolytic bath 12 is required to be heated to not less than 80° C. nor more than 90° C. and dissolved in a liquid state to electrolyze the electrolytic bath 12.

When a current flows through the anode 15 a, the cathode 15 b, and the electrolytic bath 12 during the electrolyzation, Joule heat due to electric resistances of the anode 15 a, the cathode 15 b, and the electrolytic bath 12 is generated. When the electrolytic bath 12 is dissolved, heat of dissolution is generated. Thus, the temperature of the electrolytic bath 12 excessively rises. As a result, vapor pressure of HF in the electrolytic bath 12 increases so that HF is released from the electrolytic bath 12. In this case, the purity of a fluorine gas taken out of the exhaust pipe 17 a may decrease, and the electrolyzation efficiency of HF may decrease. Therefore, the temperature of the electrolytic bath 12 is required to be maintained in an appropriate temperature range.

First, the controller 23 turns on the heater 21 a. Thus, the temperature of the electrolyzer 11 rises, and the temperature of the electrolytic bath 12 in the electrolyzer 11 also rises. The controller 23 controls ON and OFF of the heater 21 a based on the temperature detected by the temperature sensor 22 a until the electrolytic bath 12 is dissolved. The temperature of the electrolyzer 11 (hereinafter referred to as a lower-limit electrolyzer temperature) obtained when the electrolytic bath 12 is dissolved is previously measured.

The controller 23 turns off the heater 21 a when the temperature detected by the temperature sensor 22 a becomes an upper-limit value (hereinafter referred to as an upper-limit electrolyzer temperature) previously set to prevent the temperature of the electrolyzer 11 from excessively rising.

When the electrolytic bath 12 is dissolved, the temperature sensor 22 b can detect the temperature of the electrolytic bath 12. When electrolyzation is started, Joule heat or the like is generated so that an amount of heat larger than an amount of heat lost by natural heat dissipation is put into the electrolytic bath 12. Thus, the temperature of the electrolytic bath 12 rises even in a state where the heater 21 a is stopped.

The controller 23 controls ON and OFF of the heater 21 a and the blower 21 b based on the temperature detected by the temperature sensor 22 b when the temperature detected by the temperature sensor 22 a becomes the lower-limit electrolyzer temperature or more.

FIG. 3 is a flowchart illustrating a control operation of the heater 21 a and the blower 21 b by the controller 23.

Hereinafter, an upper-limit value of a temperature range of an electrolytic bath most suitable for electrolyzation is referred to as a target upper-limit temperature, and a lower-limit value of the temperature range of the electrolytic bath most suitable for electrolyzation is referred to as a target lower-limit temperature.

A temperature at which the heater 21 a is turned off and the blower 21 b is turned on so that the temperature of the electrolytic bath does not exceed the target upper-limit temperature is referred to as a cooling start temperature, and a temperature at which the heater 21 a is turned on and the blower 21 b is turned off so that the temperature of the electrolytic bath does not decrease beyond the target lower-limit temperature is referred to as a heating start temperature. The cooling start temperature is set to a value lower by a predetermined temperature (e.g., one degree) than the target upper-limit temperature, and the heating start temperature is set to a value higher by a predetermined temperature (e.g., one degree) than the target lower-limit temperature.

In an initial state, the heater 21 a is turned on, and the blower 21 b is turned off.

The controller 23 determines whether the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b rises to the cooling start temperature (step S1). If the temperature of the electrolytic bath 12 does not rise to the cooling start temperature, the controller 23 waits until the temperature of the electrolytic bath 12 reaches the cooling start temperature. If the temperature of the electrolytic bath 12 rises to the cooling start temperature, the controller 23 turns off the heater 21 a (step S2), and turns on the blower 21 b (step S3).

The controller 23 then determines whether the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b falls to the heating start temperature (step S4). If the temperature of the electrolytic bath 12 does not fall to the heating start temperature, the controller 23 waits until the temperature of the electrolytic bath 12 reaches the heating start temperature. If the temperature of the electrolytic bath 12 falls to the heating start temperature, the controller 23 turns on the heater 21 a (step S5), and turns off the blower 21 b (step S6), and the processing returns to step S1.

In this manner, the temperature of the electrolytic bath 12 is kept between a target upper-limit temperature higher by a predetermined temperature than the cooling start temperature and a target lower-limit temperature lower by a predetermined temperature than the heating start temperature.

(3) Effects of Embodiment

In the electrolytic apparatus 10 according to the present embodiment, the electrolyzer 11 is supported by the supporting member 31 to be electrically insulated from the housing 32. The heater 21 a and the blower 21 b are electrically insulated from the electrolyzer 11. In this state, the electrolyzer 11 is heated by heat conduction from the heater 21 a, and is cooled by air circulation from the blower 21 b.

In this case, a potential is not applied to the electrolyzer 11 via the heater 21 a and the blower 21 b. Therefore, the corrosion in the electrolyzer 11 can be prevented by applying a stable anticorrosion voltage to the electrolyzer 11. Thus, the maintenance cost of the electrolyzer 11 can be reduced.

The electrolyzer 11 is heated by heat conduction, and is cooled by air circulation. In this case, a heat medium having insulation properties for heating and cooling the electrolyzer 11 is not required. Therefore, the electrolyzer 11 can be heated and cooled in a low-cost and simple configuration.

Further, the electrolyzer 11 is directly heated and cooled by heat conduction from the heater 21 a and air circulation form the blower 21 b, unlike that in heat exchange using a heat medium. Thus, the temperature of the electrolytic bath 12 in the electrolyzer 11 can be controlled stably and with high accuracy.

(4) Examples

In an inventive example and a comparative example, described below, the electrolytic apparatus 10 illustrated in FIGS. 1 and 2 was used, to control the temperature of the electrolytic bath 12. An electrolytic apparatus used in the comparative example had the same configuration as that of the electrolytic apparatus 10 illustrated in FIGS. 1 and 2 except that the blower 21 b was not attached thereto.

In the inventive example and the comparative example, the heating start temperature and the cooling start temperature of the electrolytic bath 12 were respectively set to 85° C. and 86° C.

In the inventive example, when the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b rose to 86° C., the heater 21 a was turned off while the blower 21 b was turned on so that the electrolytic bath 12 was forcedly cooled by air blowing. When the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b fell to 85° C., the heater 21 a was turned on while the blower 21 b was turned off so that the electrolytic bath 12 was heated.

On the other hand, in the comparative example, when the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b rose to 86° C., the heater 21 a was turned off while the electrolytic bath 12 was naturally cooled. When the temperature of the electrolytic bath 12 detected by the temperature sensor 22 b fell to 85° C., the heater 21 a was turned on, and the electrolytic bath 12 was heated.

FIGS. 4 (a) and 4 (b) are diagrams respectively illustrating results of the temperatures of the electrolytic bathes 12 in the inventive example and the comparative example. In FIG. 4, the horizontal axis indicates time, and the vertical axis indicates the temperature of the electrolytic bath 12.

As illustrated in FIG. 4 (a), in the inventive example, a variation in the temperature of the electrolytic bath 12 was controlled within a range of two degrees for a period of 889 minutes. On the other hand, in the comparative example, a variation in the temperature of the electrolytic bath 12 was four degrees or more for a period of 865 minutes.

As apparent from the results of the inventive example and the comparative example, the heater 21 a as well as the blower 21 b was used so that the variation in the temperature of the electrolytic bath 12 could be kept approximately constant.

(5) Another Embodiment

FIG. 5 is a schematic view on the outer side of mainly an electrolyzer in an electrolytic apparatus according to another embodiment of the present invention.

An electrolytic apparatus 10 illustrated in FIG. 5 differs from the electrolytic apparatus 10 illustrated in FIGS. 1 and 2 in that a plurality of infrared heating devices 21 c are arranged around an electrolyzer 11 in place of the heater 21 a.

The plurality of infrared heating devices 21 c are spaced apart from the electrolyzer 11, to radiate infrared rays to the electrolyzer 11. Thus, the plurality of infrared heating devices 21 c heat the electrolyzer 11 by heat radiation in the state of being electrically insulated from the electrolyzer 11.

FIG. 6 is a schematic view on the outer side of mainly an electrolyzer in an electrolytic apparatus according to still another embodiment of the present invention.

An electrolytic apparatus 10 illustrated in FIG. 6 differs from the electrolytic apparatus 10 illustrated in FIGS. 1 and 2 in that a plurality of cooling devices 21 d are attached thereto in a distributed manner in contact with outer surfaces of side portions of an electrolyzer main body 11 a in place of the blower 21 b. The cooling device 21 d has a configuration in which a Peltier element is insulated by being coated with a ceramic material, an insulating film and the like. Thus, a plurality of cooling devices 21 d cool the electrolyzer 11 by performing a heat absorption operation in the state of being electrically insulated from the electrolyzer 11.

The plurality of infrared heating devices 21 c may be provided in place of the heater 21 a illustrated in FIGS. 1 and 2, and the plurality of cooling devices 21 d may be provided in place of the blower 21 b.

(6) Correspondences between Elements in the Claims and Parts in Embodiments

In the following paragraphs, non-limiting examples of correspondences between various elements recited in the claims below and those described above with respect to various preferred embodiments of the present invention are explained.

The heater 21 a and the infrared heating device 21 c are examples of a heat source and a heating unit, the blower 21 b and the cooling device 21 d are examples of a heat dissipation source and a cooling unit, the electrically-heated wire of the sheathed heater is an example of a heating element, the heater 21 a is an example of a heater, the Peltier element is an example of a cooling element, the anode chamber 14 a is an example of a first chamber, the cathode chamber 14 b is an example of a second chamber, the anode 15 a is an example of a first electrode, the cathode 15 b is an example of a second electrode, the controller 23 is an example of a controller, and the temperature sensor 22 b is an example of a detector.

As each of various elements recited in the claims, various other elements having configurations or functions described in the claims can be also used.

INDUSTRIAL APPLICABILITY

The present invention is effectively applicable to an electrolytic apparatus such as a gas generation apparatus. 

1. An electrolytic apparatus comprising: an electrolyzer that accommodates an electrolytic bath; a heating unit that heats said electrolyzer using its heat source electrically insulated from said electrolyzer; and a cooling unit that cools said electrolyzer using its heat dissipation source electrically insulated from said electrolyzer.
 2. The electrolytic apparatus according to claim 1, wherein said heating unit includes a heater having a heating element that is coated with an insulating film as said heat source, and said heater is provided in contact with an outer surface of said electrolyzer.
 3. The electrolytic apparatus according to claim 1, wherein said heating unit includes an infrared heating device that radiates infrared rays as said heat source, and said infrared heating device is spaced apart from said electrolyzer so as to be insulated therefrom.
 4. The electrolytic apparatus according to claim 1, wherein said cooling unit includes a blower that blows air to said electrolyzer as said heat dissipation source, and said blower is spaced apart from said electrolyzer so as to be insulated therefrom.
 5. The electrolytic apparatus according to claim 1, wherein said cooling unit includes a cooling device having a cooling element that is coated with an insulating film as said heat dissipation source, and said cooling device is provided in contact with an outer surface of said electrolyzer.
 6. The electrolytic apparatus according to claim 1, wherein a first chamber is provided in said electrolyzer, and a second chamber is provided between said first chamber and said electrolyzer, and a first electrode is arranged in said first chamber, and said electrolyzer functions as a second electrode.
 7. The electrolytic apparatus according to claim 1, further comprising a controller that controls said heating unit and said cooling unit so that a temperature of the electrolytic bath in said electrolyzer is maintained within a predetermined target temperature range.
 8. The electrolytic apparatus according to claim 7, further comprising a detector that detects a temperature of the electrolytic bath in said electrolyzer, wherein said controller stops an operation of said heating unit while operating said cooling unit when the temperature detected by said detector rises to a first temperature lower than an upper-limit value of said target temperature range, and operates said heating unit while stopping an operation of said cooling unit when the temperature detected by said detector falls to a second temperature higher than a lower-limit value of said target temperature range.
 9. The electrolytic apparatus according to claim 8, wherein said controller controls said heating unit and said cooling unit so that a difference between the upper-limit value and the lower-limit value of said target temperature range is within two degrees.
 10. The electrolytic apparatus according to claim 1, wherein said electrolyzer is an electrolyzer for fluorine generation. 